DEPOSITION OF TIO2 ON HEATED SUBSTRATES BY THE SPRAY INDUCTIVELY-COUPLED-PLASMA TECHNIQUE

被引:4
作者
MIZOGUCHI, Y
KAGAWA, M
SYONO, Y
HIRAI, T
机构
[1] Institute for Materials Research, Tohoku University, Sendai
关键词
D O I
10.1007/BF00540009
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:1854 / 1855
页数:2
相关论文
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