INTERFEROMETRIC SURFACE ROUGHNESS MEASUREMENT

被引：20

作者：

RIBBENS, WB

机构：

[1] Electrical Engineering Department, Ann Arbor, MI

[2] The University of Michigan, Ann Arbor, MI

来源：

APPLIED OPTICS | 1969年 / 8卷 / 11期

关键词：

D O I：

10.1364/AO.8.002173

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper reports a method of measuring surface roughness using coherent optics and interferometry. Included are both the theory of the technique and experimental verification. The range of surface roughness which can be accurately measured by this method is also reported. © 1969 Optical Society of America.

引用

页码：2173 / &