MEV ION-IMPLANTATION STUDIES ON LPE FILMS GROWN ON INP

被引:3
作者
BARDIN, TT [1 ]
PRONKO, JG [1 ]
MARDINLY, AJ [1 ]
WIE, CR [1 ]
机构
[1] SUNY BUFFALO,DEPT ELECT & COMP ENGN,BUFFALO,NY 14260
关键词
D O I
10.1016/0168-583X(89)91039-2
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:533 / 536
页数:4
相关论文
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