STUDIES OF JET CONFIGURATIONS FOR JET-ENHANCED SPUTTERING DEVICES

被引：15

作者：

KIM, HJ

PARK, YS

CHO, JH

LEE, GH

CHO, KH

LEE, KB

KIM, HS

机构：

[1] CHUNGNAM NATL UNIV,DEPT CHEM,TAEJON 305764,SOUTH KOREA

[2] SEOUL NATL UNIV,DEPT CHEM,SEOUL 152742,SOUTH KOREA

来源：

JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY | 1995年 / 10卷 / 04期

关键词：

JET-ENHANCED GLOW DISCHARGE DEVICE; ATOMIC ABSORPTION; ATOMIC EMISSION; SPUTTER RATE;

D O I：

10.1039/ja9951000335

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A modified gas, jet-enhanced glow discharge device for atomic spectrometry has been developed. Three types of jet configurations were constructed and investigated: six-jet, cone-jet and cylinder-jet. The discharge current, pressure and gas flow rate were studied for optimum discharge conditions. The sample mass loss for a Cu sample increases three-fold using a six-jet and cone-jet configuration, with a gas flow rate increase of 0-200 seem. However, the sample mass loss increases-from 0.8 to 1.5 mg as the gas flow rate increases from 0 to 200 sccm with a cylinder-jet configuration. The maximum absorbance was obtained with a cone-jet configuration at 1.7 mbar, 150 seem and 30 mA discharge current.

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收藏

页码：335 / 340

页数：6

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