NUCLEATION THEORY - PRESENT STATUS AND OUTSTANDING PROBLEMS

被引:23
作者
LEWIS, B
机构
[1] Allen Clark Research Centre, The Plessey Company Limited, Caswell, Towcester, Northants
关键词
D O I
10.1016/0040-6090(78)90109-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Our understanding of the nucleation and initial stages of growth of amorphous and epitaxial films has developed substantially over the last decade. The outstanding problems are concerned mainly with the distribution of monomer and nucleation rate, the cluster size and spatial distributions and their effects on growth and mobility coalescence. However, since the material parameters which control nucleation behaviour are usually not known, optimum deposition conditions for any application must be found by experiment. Consequently further theoretical refinement over the next decade is unlikely. © 1978.
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页码:233 / 240
页数:8
相关论文
共 43 条
[1]   NUCLEATION KINETICS OF SILVER DEPOSITED ONTO UHV CLEAVED SURFACES OF NACL, KCL AND KBR [J].
DONOHOE, AJ ;
ROBINS, JL .
THIN SOLID FILMS, 1976, 33 (03) :363-372
[2]   CLUSTER GROWTH AND SATURATION ISLAND DENSITIES IN THIN-FILM GROWTH [J].
HALPERN, V .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) :4627-&
[3]   VAPOR-DEPOSITION OF SILVER, GOLD AND PALLADIUM ON CARBON AND SILICON DIOXIDE IN ION-PUMPED VACUUM [J].
HAMILTON, JF ;
LOGEL, PC .
THIN SOLID FILMS, 1974, 23 (01) :89-100
[4]   NUCLEATION AND GROWTH OF AG AND PD ON AMORPHOUS CARBON BY VAPOR-DEPOSITION [J].
HAMILTON, JF ;
LOGEL, PC .
THIN SOLID FILMS, 1973, 16 (01) :49-63
[5]  
Hirth J. P., 1967, PHYS THIN FILMS, V4, P97
[6]   PHYSICAL PROCESSES IN EPITAXIAL GROWTH [J].
LEWIS, B .
THIN SOLID FILMS, 1971, 7 (3-4) :179-&
[7]  
LEWIS B, 1970, THIN SOLID FILMS, V6, P1, DOI 10.1016/0040-6090(70)90011-8
[10]   ADATOM MIGRATION, CAPTURE AND DECAY AMONG COMPETING NUCLEI ON A SUBSTRATE [J].
LEWIS, B ;
REES, GJ .
PHILOSOPHICAL MAGAZINE, 1974, 29 (06) :1253-1280