DEFECT FLOW INDUCED OUT-DIFFUSION IN A1-]ZN IMPLANTATIONS

被引：10

作者：

HIRVONEN, J

ANTTILA, A

HAUTALA, M

机构：

来源：

关键词：

D O I：

10.1016/0375-9601(78)90665-5

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：226 / 228

页数：3

共 11 条

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[3]

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[4]

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[5] STUDY OF DIFFUSION OF AU AND AG IN BE USING ION-BEAMS [J].

MYERS, SM ;

LANGLEY, RA .

[6]

SCHUMACHER D, 1970, VACANCIES INTERSTIT, P889

[7]

Shewmon P.G., 1963, DIFFUSION SOLIDS, P47

[8]

SMITHELLS CJ, 1976, METALS REFERENCE BOO, P868

[9]

Thompson M.W., 1974, DEFECTS RAD DAMAGE M

[10] THERMAL SPIKES AND ACTIVATED PROCESSES [J].

VINEYARD, GH .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1976, 29 (04) :245-248