X-RAY TOTAL-EXTERNAL-REFLECTION-BRAGG DIFFRACTION - STRUCTURAL STUDY OF THE GAAS-AL INTERFACE

被引:494
作者
MARRA, WC
EISENBERGER, P
CHO, AY
机构
[1] Bell Laboratories, Murray Hill
关键词
D O I
10.1063/1.325845
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new technique utilizing conventional x-ray diffraction in conjunction with total external reflection has provided a powerful tool for studying ordered interfaces and surface phenomena. It has been used in this work to study the details of the interface region of a molecular beam epitaxially grown Al single crystal on a molecular beam epitaxially grown GaAs single-crystal substrate. A simple model including variations of the lattice parameter and disorder in the interface region is in agreement with these experimental results.
引用
收藏
页码:6927 / 6933
页数:7
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