FABRICATION AND CHARACTERIZATION OF A SILICON MICROVALVE

被引：12

作者：

EMMER, A ^{[1
]}

JANSSON, M ^{[1
]}

ROERAADE, J ^{[1
]}

LINDBERG, U ^{[1
]}

HOK, B ^{[1
]}

机构：

[1] ROYAL INST TECHNOL,DEPT ANALYT CHEM,S-10044 STOCKHOLM 70,SWEDEN

来源：

JOURNAL OF MICROCOLUMN SEPARATIONS | 1992年 / 4卷 / 01期

关键词：

MICROVALVE; SILICON MICROMACHINING;

D O I：

10.1002/mcs.1220040104

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The fabrication of a unidirectional micro-valve in silicon is reported. Pressure/flow characteristics between 0-1 bar for water were measured. Practically no leakage was observed (less than 1 nL min-1) when the valve was pressurized in the backward direction. A nonlinear pressure-flow relation, believed to be due to the particular design of the closing cantilever beam, was observed in the forward direction. Some of the merits of the construction are discussed.

引用

页码：13 / 15

页数：3