ATOMIC-HYDROGEN BEAM SOURCE - CONVENIENT, EXTENDED CAVITY, MICROWAVE-DISCHARGE DESIGN

被引:21
作者
MURPHY, EJ
BROPHY, JH
机构
[1] Massachusetts Institute of Technology, Department of Chemistry, Cambridge
关键词
D O I
10.1063/1.1135898
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
An extended cavity design of a microwave discharge source for production of intense beams of atomic, radical, and metastable species in vacuo is described. The extended cavity enables the discharge to be run at the beam source nozzle while the power connection and tuning elements remain conveniently outside the apparatus. This design minimizes wall recombination losses to produce intense atomic hydrogen beams with considerably less engineering than previous discharge sources.
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页码:635 / 636
页数:2
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