INITIAL OXIDATION OF CULNSE2

被引:109
作者
KAZMERSKI, LL [1 ]
JAMJOUM, O [1 ]
IRELAND, PJ [1 ]
DEB, SK [1 ]
MICKELSEN, RA [1 ]
CHEN, W [1 ]
机构
[1] BOEING AEROSP CO,SEATTLE,WA 98125
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期
关键词
D O I
10.1116/1.571040
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:467 / 471
页数:5
相关论文
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