SYNTHESIS OF SILICON OXYNITRIDE FROM A POLYMERIC PRECURSOR .2. THE FORMATION OF TRIMETHYLCYCLOTRISILAZANE AND TETRAMETHYLCYCLOTETRASILAZANE FROM THE AMMONOLYSIS OF DICHLOROMETHYLSILANE IN DIETHYL-ETHER

Proton nuclear magnetic resonance (H-1 NMR) spectroscopy, Fourier transform infrared (FT-IR) spectroscopy and gas chromatography (GC) have been used to study the products of ammonolysis of dichloromethylsilane in diethyl ether at 0 degrees C. Results indicate that the major products are trimethylcyclotrisilazane and tetramethylcyclotetrasilazane. Hydrolysis of the cyclosilazanes has also been qualitatively investigated. A simple and useful method for the identification of cyclosilazanes has been developed using the H-1 NMR technique.