DYNAMICS OF A COLLISIONAL, CAPACITIVE RF SHEATH

被引:250
作者
LIEBERMAN, MA [1 ]
机构
[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720
关键词
D O I
10.1109/27.24645
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
引用
收藏
页码:338 / 341
页数:4
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