DYNAMICS AND CONTROL OF THE CZOCHRALSKI PROCESS .1. MODELING AND DYNAMIC CHARACTERIZATION

被引：48

作者：

GEVELBER, MA

STEPHANOPOULOS, G

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1987年 / 84卷 / 04期

关键词：

D O I：

10.1016/0022-0248(87)90056-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：647 / 668

页数：22

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