MICROMACHINING OF MONOCRYSTALLINE SILICON AND GLASS FOR CHEMICAL-ANALYSIS SYSTEMS - A LOOK INTO NEXT CENTURY TECHNOLOGY OR JUST A FASHIONABLE CRAZE

被引：215

作者：

MANZ, A ^{[1
]}

FETTINGER, JC ^{[1
]}

VERPOORTE, E ^{[1
]}

LUDI, H ^{[1
]}

WIDMER, HM ^{[1
]}

HARRISON, DJ ^{[1
]}

机构：

[1] UNIV ALBERTA,DEPT CHEM,EDMONTON T6G 2G2,ALBERTA,CANADA

来源：

TRAC-TRENDS IN ANALYTICAL CHEMISTRY | 1991年 / 10卷 / 05期

关键词：

D O I：

10.1016/0165-9936(91)85116-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Miniaturization of already existing techniques in on-line analytical chemistry is an alternative to compound-selective chemical sensors. Theory indicates higher efficiency, faster analysis time and lower reagent consumption. Micromachining, a well known photolithographic technique for structures in the micrometer range, is introduced and documented with structures as examples for flow injection analysis, electrophoresis and a detector cell.

引用

页码：144 / 149

页数：6

共 24 条

[1] CHEMICAL SENSING IN THE ENVIRONMENT - THE CHALLENGE TO THE ANALYTICAL CHEMIST
EDMONDS, TE
[J]. TRAC-TRENDS IN ANALYTICAL CHEMISTRY, 1985, 4 (09) : 220 - 224
[2] FILLIPINI C, 1991, IN PRESS J BIOTECHNO
[3] A FLOW-INJECTION ANALYSIS SYSTEM FOR FERMENTATION MONITORING AND CONTROL
GARN, M
GISIN, M
THOMMEN, C
CEVEY, P
[J]. BIOTECHNOLOGY AND BIOENGINEERING, 1989, 34 (04) : 423 - 428
[4] THE USE OF CHEMICAL SENSORS IN INDUSTRY
GRABER, N
LUDI, H
WIDMER, HM
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) : 239 - 243
[5] GUILBAULT GG, 1983, ANAL CHEM S SER, V17, P637
[6] FLOW-INJECTION ANALYSIS AND BIOSENSORS - APPLICATIONS FOR BIOTECHNOLOGY AND ENVIRONMENTAL-CONTROL
LUDI, H
GARN, MB
BATAILLARD, P
WIDMER, HM
[J]. JOURNAL OF BIOTECHNOLOGY, 1990, 14 (01) : 71 - 79
[7] POTENTIOMETRIC DETECTOR FOR FAST HIGH-PERFORMANCE OPEN-TUBULAR COLUMN LIQUID-CHROMATOGRAPHY
MANZ, A
SIMON, W
[J]. ANALYTICAL CHEMISTRY, 1987, 59 (01) : 74 - 79
[8] MINIATURIZED TOTAL CHEMICAL-ANALYSIS SYSTEMS - A NOVEL CONCEPT FOR CHEMICAL SENSING
MANZ, A
GRABER, N
WIDMER, HM
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) : 244 - 248
[9] DESIGN OF AN OPEN-TUBULAR COLUMN LIQUID CHROMATOGRAPH USING SILICON CHIP TECHNOLOGY
MANZ, A
MIYAHARA, Y
MIURA, J
WATANABE, Y
MIYAGI, H
SATO, K
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) : 249 - 255
[10] MONNIG CA, 1991, IN PRESS ANAL CHEM, V63

← 1 2 3 →