TRANSMIT - A BEAMLINE MODELING PROGRAM

被引：17

作者：

CERRINA, F

BASZLER, F

TURNER, S

KHAN, M

机构：

[1] Center for X-ray Lithography, University of Wisconsin -, Madison

来源：

MICROELECTRONIC ENGINEERING | 1993年 / 21卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(93)90037-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

[No abstract available]

引用

页码：103 / 106

页数：4

共 4 条

[1]

Henke, Lee, Tanaka, Shimbukuno, Fujikawa, Low energy X-ray Diagnostic, APS Topical Conf. Proceed., 75, (1981)

[2]

Auerbach, Tirsell, LLNL Rep. UCRL91230, (1984)

[3]

Cromer, :iberman, Anomalous dispersion calculations near to and on the long-wavelength side of an absorption edge, Acta Crystallographica Section A, 37 A, (1981)

[4]

Baszler, Hansen, Cerrina, Absolute flux measurements for x-ray lithography beamlines, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 8 B, (1990)

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