REGULARITIES OF PYROLYTIC BORON-NITRIDE COATING FORMATION ON A GRAPHITE MATRIX

被引:33
作者
ROZENBERG, AS
SINENKO, YA
CHUKANOV, NV
机构
[1] USSR Academy of Sciences Institute of Chemical Physics, Chernogolovka
关键词
D O I
10.1007/BF00367825
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The kinetics and structure of chemical vapour-phase deposition of boron nitride ceramics on a graphite matrix from the mixture BCl3/NH3/N2 have been investigated for a wide range of conditions (temperature 1300-2100-degrees-C, pressure 130-2600 Pa, at varying partial pressures of the components). The growth-rate was found to vary non-linearly with the consumption rates of the reagents. The content of hexagonal components in the BN-ceramics rose, while the turbostrate microphase content diminished with temperature. The dependences of the concentrations of hexagonal, turbostratic and amorphous fractions in BN-ceramics on the reaction mixture composition and total pressure have been determined.
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页码:5528 / 5533
页数:6
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