SILICON DIFFUSED-ELEMENT PIEZORESISTIVE DIAPHRAGMS

被引：165

作者：

TUFTE, ON

LONG, D

CHAPMAN, PW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1962年 / 33卷 / 11期

关键词：

D O I：

10.1063/1.1931164

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：3322 / &

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[8] TUFTE ON, TO BE PUBLISHED