RADIATION-DAMAGE PROCESSES AFFECTING ELECTRON-BEAM LITHOGRAPHY OF INORGANIC MATERIALS

被引：5

作者：

MEDLIN, DL ^{[1
]}

HOWITT, DG ^{[1
]}

机构：

[1] UNIV CALIF DAVIS,DEPT MECH AERONAUT & MAT ENGN,DAVIS,CA 95616

来源：

SCANNING | 1992年 / 14卷 / 02期

关键词：

D O I：

10.1002/sca.4950140205

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

[No abstract available]

引用

页码：86 / 90

页数：5

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