THERMAL-DECOMPOSITION OF PLASMA-POLYMERIZED ORGANO-SILICON THIN-FILMS

被引：26

作者：

WROBEL, AM

KOWALSKI, J

GREBOWICZ, J

KRYSZEWSKI, M

机构：

来源：

JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY | 1982年 / A17卷 / 03期

关键词：

D O I：

10.1080/00222338208056482

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：433 / 452

页数：20

共 28 条

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