COMPARISON BETWEEN THEORETICAL AND EXPERIMENTAL SCATTERING OF AN S-POLARIZED ELECTROMAGNETIC-WAVE BY A 2-DIMENSIONAL OBSTACLE ON A SURFACE

被引:8
作者
GREFFET, JJ [1 ]
LADAN, FR [1 ]
机构
[1] MICROELECTR & MICROSTRUCT LAB,CNRS,F-92220 BAGNEUX,FRANCE
来源
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1991年 / 8卷 / 08期
关键词
D O I
10.1364/JOSAA.8.001261
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The scattering of s-polarized electromagnetic waves by a two-dimensional scatterer upon a surface is considered. An integral approach previously reported is generalized in order to account for multilayer systems. In order to compare the theory with scattered-light measurements, we have fabricated two ribs upon a germanium substrate by means of a dry-etching technique. The height and width of the ribs are approximately 5-mu-m. The ribs are separated by 15-mu-m, whereas the incident wavelength is 10.6-mu-m. A good agreement is found between theory and experiment.
引用
收藏
页码:1261 / 1269
页数:9
相关论文
共 19 条
[1]  
BENNETT JM, 1989, P SOC PHOTOPT INSTRU, V1007
[2]  
BREAULT RP, 1989, P SOC PHOTOOPT INSTR, V769
[3]  
CANDEL SM, 1981, J SOUND VIB, V74, P474
[4]  
COLLIN RE, 1960, FIELD THEORY GUIDED, pCH11
[5]   ANALYSIS OF LONGITUDINAL DISCONTINUITIES IN DIELECTRIC SLAB WAVEGUIDES [J].
COTTIS, PG ;
UZUNOGLU, NK .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1984, 1 (02) :206-215
[6]  
GREFFER JJ, 1988, THESIS U PARIS SUD O
[7]  
Greffet J.-J., 1989, P SOC PHOTOOPT INSTR, V967, P184
[8]   SCATTERING OF S-POLARIZED ELECTROMAGNETIC-WAVES BY A 2D OBSTACLE NEAR AN INTERFACE [J].
GREFFET, JJ .
OPTICS COMMUNICATIONS, 1989, 72 (05) :274-278
[9]  
GREFFET JJ, IN PRESS BACKSCATTER
[10]   NUMERICAL STUDY OF PROBLEM OF DIFFRACTION AT A LOCALLY DEFORMED PLANE WAVEGUIDE [J].
HUGONIN, JP ;
PETIT, R .
OPTICS COMMUNICATIONS, 1977, 22 (02) :221-225