LITHOGRAPHIC PATTERNING OF CONDUCTING POLYMERS AND THEIR COMPOSITES

被引：24

作者：

BARGON, J ^{[1
]}

BEHNCK, W ^{[1
]}

WEIDENBRUCK, T ^{[1
]}

UENO, T ^{[1
]}

机构：

[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO 185,JAPAN

来源：

SYNTHETIC METALS | 1991年 / 41卷 / 03期

关键词：

D O I：

10.1016/0379-6779(91)91564-Q

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Intrinsically conducting polymers can be shaped into patterns using a lithographic approach which takes advantage of the photosensitivity of certain oxidants. For this purpose a composite consisting of a photosensitive oxidant and a suitable binder polymer is exposed to visible, UV- or actinic radiation and subsequently developed into a pattern of a conducting composite in a pyrrole vapor. This two-dimensional pattern can either be etched into a three-dimensional structure, or it may be reinforced electrochemically via electroplating a metal on top of the patterned conducting composite. A typical example is the system PVC, Fe(III)-salts and pyrrole.

引用

页码：1111 / 1114

页数：4

共 9 条

[1]

BARGON J, 1990, SPIE P, V1262, P564

[2] AN ELECTRICALLY CONDUCTIVE PLASTIC COMPOSITE DERIVED FROM POLYPYRROLE AND POLYVINYL-CHLORIDE) [J].