EFFECTS OF INERT-GAS DILUTION OF SILANE ON PLASMA-DEPOSITED A-SI-H FILMS

被引：154

作者：

KNIGHTS, JC ^{[1
]}

LUJAN, RA ^{[1
]}

ROSENBLUM, MP ^{[1
]}

STREET, RA ^{[1
]}

BIEGLESEN, DK ^{[1
]}

REIMER, JA ^{[1
]}

机构：

[1] CALTECH,DIV CHEM & CHEM ENGN,PASADENA,CA 91125

来源：

关键词：

D O I：

10.1063/1.92359

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：331 / 333

页数：3

共 11 条

[1] CARLSON DE, 1977, RCA REV, V38, P211
[2] MICROSTRUCTURE OF PLASMA-DEPOSITED A-SI-H FILMS
KNIGHTS, JC
LUJAN, RA
[J]. APPLIED PHYSICS LETTERS, 1979, 35 (03) : 244 - 246
[3] LAMPE FW, COMMUNICATION
[4] STRUCTURAL INTERPRETATION OF THE VIBRATIONAL-SPECTRA OF A-SI-H ALLOYS
LUCOVSKY, G
NEMANICH, RJ
KNIGHTS, JC
[J]. PHYSICAL REVIEW B, 1979, 19 (04): : 2064 - 2073
[5] MORT J, SOLAR CELL MATERIALS
[6] PROTON MAGNETIC-RESONANCE SPECTRA OF PLASMA-DEPOSITED AMORPHOUS SI-H FILMS
REIMER, JA
VAUGHAN, RW
KNIGHTS, JC
[J]. PHYSICAL REVIEW LETTERS, 1980, 44 (03) : 193 - 196
[7] REIMER JA, UNPUBLISHED
[8] A-SI THIN-FILM AS A PHOTO-RECEPTOR FOR ELECTROPHOTOGRAPHY
SHIMIZU, I
KOMATSU, T
SAITO, K
INOUE, E
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 773 - 778
[9] LUMINESCENCE STUDIES OF PLASMA-DEPOSITED HYDROGENATED SILICON
STREET, RA
KNIGHTS, JC
BIEGELSEN, DK
[J]. PHYSICAL REVIEW B, 1978, 18 (04): : 1880 - 1891
[10] STREET RA, UNPUBLISHED