EFFECT OF OXYGEN AGGREGATION PROCESSES ON THE RECOMBINING ACTIVITY OF 60-DEGREES DISLOCATIONS IN CZOCHRALSKI-GROWN SILICON

被引：26

作者：

ACERBONI, S ^{[1
]}

PIZZINI, S ^{[1
]}

BINETTI, S ^{[1
]}

ACCIARRI, M ^{[1
]}

PICHAUD, B ^{[1
]}

机构：

[1] UNIV AIX MARSEILLE,CNRS,MATOP LAB,F-13397 MARSEILLE 13,FRANCE

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 76卷 / 05期

关键词：

D O I：

10.1063/1.357573

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The interaction of dislocations with light elements like oxygen and carbon presents a variety of aspects which are of basic interest for the understanding of gettering processes, as well as for a deeper knowledge of the electrical and optical properties of dislocations. We report the results of a systematic investigation of the influence of the dislocations on the segregation of oxygen and of the effect of oxygen segregation on their electrical activities. The experiments were carried out on p-type Czochralski silicon, in the 700-1100-degrees-C temperature range. It has been shown that not only a direct oxygen-dislocation interaction occurs, but also that a competition between homogeneous and heterogeneous segregation processes occurs, which influences the overall electrical properties of the samples as well.

引用

页码：2703 / 2710

页数：8

共 26 条

[1]

ALEXANDER H, 1986, DISLOCATIONS SOLIDS, V7, P151

[2] EFFECT OF CHEMICALS ON METAL CONTAMINATION ON SILICON-WAFERS [J].

ANTTILA, OJ ;

TILLI, MV ;

SCHAEKERS, M ;

CLAEYS, CL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (04) :1180-1185

[3] MODIFICATION OF THE DISLOCATION LUMINESCENCE SPECTRUM BY OXYGEN ATMOSPHERES IN SILICON [J].

DROZDOV, NA ;

PATRIN, AA ;

TKACHEV, VT .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1981, 64 (01) :K63-K65

[4]

HIGGS V, 1992, MATER SCI FORUM, V83, P1309, DOI 10.4028/www.scientific.net/MSF.83-87.1309

[5]

HIGGS V, 1989, MATER RES SOC S P, V163, P57

[6]

HIGGS V, 1993, SOLID STATE PHENOM, V32, P291

[7] VACANCIES AND SELF-INTERSTITIALS IN SILICON - GENERATION AND INTERACTION IN DIFFUSION [J].

HU, SM .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (07) :2066-2075

[8]

HUBER D, 1983, AGGREGATION PHENOMEN, V83, P111

[9]

KNIFFIN ML, 1992, J ELECTROCHEM SOC, V139, P1196

[10]

LABUSCH R, 1983, DISLOCATIONS SOLIDS, V5, P127

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