ELLIPSOMETRY AND ITS APPLICATIONS TO SURFACE EXAMINATION

被引：18

作者：

NEAL, WEJ ^{[1
]}

FANE, RW ^{[1
]}

机构：

[1] UNIV ASTON,PHYS DEPT,BIRMINGHAM B4 7ET,ENGLAND

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1973年 / 6卷 / 05期

关键词：

D O I：

10.1088/0022-3735/6/5/001

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：409 / 416

页数：8

共 111 条

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[2]

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[3]

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ARCHER, RJ .

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[6]

BARRETT MA, 1962, 1 INT C MET CORR, P657

[7]

BEATTIE JR, 1955, PHILOS MAG, V46, P222

[8]

BEATTIE JR, 1955, PHILOS MAG, V46, P235

[9] INFRARED REFLECTANCE OF ALUMINUM EVAPORATED IN ULTRA-HIGH VACUUM [J].

BENNETT, HE ;

ASHLEY, EJ ;

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JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1963, 53 (09) :1089-&

[10]

BENNETT JM, 1970, J OPT SOC AM, V60, P244

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