LANGMUIR PROBE MEASUREMENTS IN NEGATIVE GLOW OF A SPUTTERING DC DISCHARGE

被引：13

作者：

LEMPERIERE, G

POITEVIN, JM

FOURRIER, C

机构：

[1] Inst. de Phys., Univ. de Nantes, Nantes

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1978年 / 11卷 / 03期

关键词：

D O I：

10.1088/0022-3727/11/3/016

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Radial and axial profiles of the density ne and temperature Te of the slow electron group have been studied in the negative glow of an abnormal discharge in a DC diode sputtering system, by Langmuir probes. The variations of ne and Te have been also studied as a function of discharge current and discharge pressure. The contamination of the probes has been examined.

引用

页码：293 / 300

页数：8

共 15 条

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