LANGMUIR PROBE MEASUREMENTS IN NEGATIVE GLOW OF A SPUTTERING DC DISCHARGE

被引:13
作者
LEMPERIERE, G
POITEVIN, JM
FOURRIER, C
机构
[1] Inst. de Phys., Univ. de Nantes, Nantes
关键词
D O I
10.1088/0022-3727/11/3/016
中图分类号
O59 [应用物理学];
学科分类号
摘要
Radial and axial profiles of the density ne and temperature Te of the slow electron group have been studied in the negative glow of an abnormal discharge in a DC diode sputtering system, by Langmuir probes. The variations of ne and Te have been also studied as a function of discharge current and discharge pressure. The contamination of the probes has been examined.
引用
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页码:293 / 300
页数:8
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