MULTILAYER CORRECTION SCHEME FOR SPREADING RESISTANCE MEASUREMENTS

被引：12

作者：

CHOO, SC ^{[1
]}

LEONG, MS ^{[1
]}

HONG, HL ^{[1
]}

LI, L ^{[1
]}

TAN, LS ^{[1
]}

机构：

[1] UNIV SINGAPORE,DEPT ELECT ENGN,SINGAPORE,SINGAPORE

来源：

关键词：

D O I：

10.1016/0038-1101(77)90173-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：839 / 848

页数：10

共 10 条

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CHOO, SC
LEONG, MS
KUAN, KL
[J]. SOLID-STATE ELECTRONICS, 1976, 19 (07) : 561 - 565
[2] CONTE SD, 1972, ELEMENTARY NUMERICAL, P237
[3] DAVIS PJ, 1975, METHODS NUMERICAL IN, pCH6
[4] CALCULATION OF SPREADING RESISTANCE CORRECTION FACTORS
HU, SM
[J]. SOLID-STATE ELECTRONICS, 1972, 15 (07) : 809 - &
[5] RESISTIVITY OF BULK SILICON AND OF DIFFUSED LAYERS IN SILICON
IRVIN, JC
[J]. BELL SYSTEM TECHNICAL JOURNAL, 1962, 41 (02): : 387 - +
[6] LEONG MS, 1976, SOLID STATE ELECTRON, V20, P255
[7] MAZUR RG, 1966, OCT EL SOC M PHIL
[8] APPLICATION OF MULTILAYER POTENTIAL DISTRIBUTION TO SPREADING RESISTANCE CORRECTION FACTORS
SCHUMANN, PA
GARDNER, EE
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (01) : 87 - &
[9] SEVERIN PJ, 1974, NBS40010 SPEC PUBL, P27
[10] YEH TH, 1970, NBS337 SPEC PUBL, P111