HIGH-SPEED IMPLEMENTATION AND EXPERIMENTAL EVALUATION OF MULTILAYER SPREADING RESISTANCE ANALYSIS

被引:19
作者
DAVANZO, DC
RUNG, RD
GAT, A
DUTTON, RW
机构
关键词
D O I
10.1149/1.2131642
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1170 / 1176
页数:7
相关论文
共 20 条
  • [1] CHOO SC, 1976, SOLID STATE ELECTRON, V19, P7
  • [2] CHOO SC, 1977, SOLID STATE ELECTRON, V20, P10
  • [3] DAVANZO DC, 1977, 50132 STANF EL LAB T
  • [4] DAVANZO DC, 1977, J IEEE SOLID STATE C, V12, P4
  • [5] DICKEY DH, 1974, NBS40010 SPEC PUB
  • [6] DICKEY DH, 1963, APR SPR M PITTSB, P151
  • [7] DICKEY DH, 1975, OCT EL SOC M DALL
  • [8] HENDRICKSON TE, 1975, J ELCHEM SO, V122, P11
  • [9] HU SM, 1972, SOLID STATE ELECTRON, V15, P7
  • [10] KUDOH O, 1976, J ELCHEM SO, V123, P11