OPTICAL FRINGE SUBDIVISION WITH NANOMETRIC ACCURACY

被引：101

作者：

BIRCH, KP

机构：

[1] National Physical Laboratory, Teddington

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1990年 / 12卷 / 04期

关键词：

calibration; fringe counting; fringes; nanometric accuracy;

D O I：

10.1016/0141-6359(90)90060-C

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Reliable bidirectional optical fringe counting is normally obtained by using two signals derived from the optical outputs of an interferometer varying sinusoidally with path difference and in phase-quadrature. This paper describes a calibration technique that uses these signals to achieve nanometric uncertainties in path length determinations. It discusses some of the limitations to achieving this uncertainty and describes a simple experimental technique for verifying the accuracy of fringe subdivision. © 1990.

引用

页码：195 / 198

页数：4