ON THE STRUCTURE OF (TI, AL)N-PVD COATINGS

被引:101
作者
KNOTEK, O [1 ]
LEYENDECKER, T [1 ]
机构
[1] FA CEMECOAT GMBH,TECHNOL ZENTRUM,D-5100 AACHEN,FED REP GER
关键词
D O I
10.1016/0022-4596(87)90071-5
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
引用
收藏
页码:318 / 322
页数:5
相关论文
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