PECULIARITIES OF LASER-INDUCED FORMATION OF SUB-MICRON HOLES IN THIN ABSORBING FILMS

被引：2

作者：

JAKOVLEV, EB ^{[1
]}

VEIKO, VP ^{[1
]}

METEV, SM ^{[1
]}

SAVTCHENKO, SK ^{[1
]}

机构：

[1] UNIV SOFIA,FAC PHYS,BU-1126 SOFIA,BULGARIA

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1982年 / 15卷 / 04期

关键词：

D O I：

10.1088/0022-3727/15/4/004

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L35 / L37

页数：3

共 6 条

[1]

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[3] GALLIUM-ARSENIDE LASER FACSIMILE PRINTER [J].

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[4] STRUCTURAL INVESTIGATION OF LASER MACHINING OF THIN BISMUTH FILMS [J].

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MAYDAN, D .

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[5] 2-PHASE MECHANISM OF LASER-INDUCED REMOVAL OF THIN ABSORBING FILMS .2. EXPERIMENT [J].

VEIKO, VP ;

METEV, SM ;

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KALEV, HA ;

JURKEVITCH, BM ;

KARPMAN, IM .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (08) :1571-&

[6] 2-PHASE MECHANISM OF LASER-INDUCED REMOVAL OF THIN ABSORBING FILMS .1. THEORY [J].

VEIKO, VP ;

METEV, SM ;

KAIDANOV, AI ;

LIBENSON, MN ;

JAKOVLEV, EB .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (08) :1565-1570

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