SURFACE ACOUSTIC-WAVE MICROSENSORS USING DIFFUSED SUBSTRATES

被引：8

作者：

HUANG, PH

机构：

[1] NBS, Gaithersburg, MD, USA, NBS, Gaithersburg, MD, USA

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 06期

关键词：

D O I：

10.1109/16.2526

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：744 / 749

页数：6

共 29 条

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[8]

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[9] SURFACE ACOUSTIC-WAVE HYDROGEN SENSOR [J].

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[10] PALLADIUM-SURFACE ACOUSTIC-WAVE INTERACTION FOR HYDROGEN DETECTION [J].

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