TIME-RESOLVED SPECTROSCOPIC STUDIES OF THE ULTRAVIOLET-LASER PHOTOLYSIS OF AL ALKYLS FOR FILM GROWTH

被引：21

作者：

ERES, D ^{[1
]}

MOTOOKA, T ^{[1
]}

GORBATKIN, S ^{[1
]}

LUBBEN, D ^{[1
]}

GREENE, JE ^{[1
]}

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.583678

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：848 / 852

页数：5

共 18 条

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