RAPID SYNTHESIS OF THE YBA2CU3OX FILM ON METAL-SUBSTRATE BY CHEMICAL VAPOR-DEPOSITION TECHNIQUE

被引：9

作者：

YAMAGUCHI, T ^{[1
]}

AOKI, S ^{[1
]}

SADAKATA, N ^{[1
]}

KOHNO, O ^{[1
]}

SAJI, A ^{[1
]}

KURODA, N ^{[1
]}

机构：

[1] CHUBU ELECT POWER CO INC,MIDORI KU,NAGOYA 459,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 07期

关键词：

CHEMICAL VAPOR DEPOSITION (CVD); YBA2CU3OX; THIN FILM; METAL SUBSTRATE;

D O I：

10.1143/JJAP.30.1398

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new chemical vapor deposition technique has been developed for rapid (max. 24-mu-m/h) formation of the oxide superconductor film on a metal substrate. In this system, blended beta-diketonate chelates of source materials were slowly fed to the vaporizer with carrier gas. The source gas from the vaporizer and O2 gas were introduced into the reactor. We realized a superconducting YBCO thin film that had a T(c) = 87 K on a Hastelloy C-276 substrate.

引用

页码：1398 / 1399

页数：2

共 3 条

[1] RAPID CHEMICAL VAPOR-DEPOSITION OF SUPERCONDUCTING YBA2CU3OX [J].

LACKEY, WJ ;

CARTER, WB ;

HANIGOFSKY, JA ;

HILL, DN ;

BAREFIELD, EK ;

NEUMEIER, G ;

OBRIEN, DF ;

SHAPIRO, MJ ;

THOMPSON, JR ;

GREEN, AJ ;

MOSS, TS ;

JAKE, RA ;

EFFERSON, KR .

APPLIED PHYSICS LETTERS, 1990, 56 (12) :1175-1177

[2] Y-BA-CU-O SUPERCONDUCTING FILMS WITH HIGH-JC VALUES BY MOCVD USING BA-ADDITION PRODUCTS [J].

MATSUNO, S ;

UCHIKAWA, F ;

YOSHIZAKI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (06) :L947-L948

[3] SUPERCONDUCTING PROPERTIES OF BA2YCU3O7-X THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION ON SRTIO3 AND A METAL-SUBSTRATE [J].

YAMAGUCHI, T ;

AOKI, S ;

SADAKATA, N ;

KOHNO, O ;

OSANAI, H .

APPLIED PHYSICS LETTERS, 1989, 55 (15) :1581-1582

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