MECHANISMS OF OPTICAL ACTIVATION OF MICROMECHANICAL RESONATORS

被引：17

作者：

FATAH, RMA ^{[1
]}

机构：

[1] UNIV LONDON UNIV COLL,DEPT ELECTR & ELECT ENGN,LONDON WC1E 7JE,ENGLAND

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 33卷 / 03期

关键词：

D O I：

10.1016/0924-4247(92)80170-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The mechanism by which micromechanical resonators are optically activated is identified and discussed. By means of a one-dimensional analysis, a mathematical formula is derived to relate the mechanical resonance frequency to the power absorbed in the resonator beam. Agreement is found between the theoretical and experimental values of the amplitude of the resonance frequency.

引用

页码：229 / 236

页数：8

共 20 条

[1]

ANDRES MW, 1985, ELECTRON LETT, V21, P1097

[2]

ASH EA, 1981, ELECTRON LETT, V17, P337

[3]

Blevins R, 1979, FORMULAS NATURAL FRE

[4]

COTTRELL AH, 1964, MECHANICAL PROPERTIE, P129

[5]

DIEULESAINT E, 1981, IEEE P 1981 ULTR S, P802

[6]

FATAH RMA, 1989, P EFCO AMSTERDAM, P418

[7]

FATAH RMA, 1990, IOP C SERIES, V111, P379

[8]

FATAH RMA, 1991, SENSORS THEIR APPLIC

[9]

KAYE GWC, 1973, TABLES PHYSICAL CHEM

[10]

MALLALIEU K, 1985, P SOC PHOTO-OPT INST, V522, P211, DOI 10.1117/12.946244

← 1 2 →