A NEW EVAPORATION METHOD FOR PREPARING HYDROGENATED AMORPHOUS-SILICON FILMS

被引：27

作者：

GRASSO, V

MEZZASALMA, AM

NERI, F

机构：

来源：

SOLID STATE COMMUNICATIONS | 1982年 / 41卷 / 09期

关键词：

D O I：

10.1016/0038-1098(82)90729-3

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：675 / 677

页数：3

共 17 条

[1] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[2] HYDROGENATED AMORPHOUS-SILICON THIN-FILMS PRODUCED BY ION PLATING
COCKS, FH
SCHARMAN, AJ
JONES, PL
COGAN, SF
[J]. APPLIED PHYSICS LETTERS, 1980, 36 (11) : 909 - 910
[3] AN ALTERNATIVE METHOD OF PREPARING HYDROGEN-DOPED EVAPORATED AMORPHOUS-SILICON - PRELIMINARY-REPORT
DELLAFERA, P
LABUSCH, R
ROSCHER, HH
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 43 (01): : 169 - 172
[4] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON
FREEMAN, EC
PAUL, W
[J]. PHYSICAL REVIEW B, 1978, 18 (08): : 4288 - 4300
[5] CHARACTERIZATION OF GLOW-DISCHARGE DEPOSITED A-SI-H
FRITZSCHE, H
[J]. SOLAR ENERGY MATERIALS, 1980, 3 (04): : 447 - 501
[6] OPTICAL AND ELECTRICAL-PROPERTIES OF EVAPORATED AMORPHOUS SILICON WITH HYDROGEN
GHOSH, AK
MCMAHON, T
ROCK, E
WIESMANN, H
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) : 3407 - 3413
[7] EFFECT OF HYDROGEN ON AMORPHOUS SILICON
HAUSER, JJ
[J]. SOLID STATE COMMUNICATIONS, 1976, 19 (11) : 1049 - 1051
[8] INFRARED BAND ASSIGNMENTS IN OXIDIZED HYDROGENATED A-SI FILMS
JOHN, P
ODEH, IM
THOMAS, MJK
TRICKER, MJ
WILSON, JIB
[J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1981, 105 (02): : 499 - 505
[9] HYDROGENATED AMORPHOUS-SILICON FILMS PREPARED BY AN ION-BEAM-SPUTTERING TECHNIQUE
KOBAYASHI, M
SARAIE, J
MATSUNAMI, H
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (09) : 696 - 697
[10] Le Comber P. G., 1972, Journal of Non-Crystalline Solids, V11, P219, DOI 10.1016/0022-3093(72)90004-X

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