MECHANICAL-PROPERTIES AND MICROSTRUCTURES OF AL-1-PERCENT-SI THIN-FILM METALLIZATIONS

被引:33
作者
GRIFFIN, AJ [1 ]
BROTZEN, FR [1 ]
DUNN, CF [1 ]
机构
[1] TEXAS INSTRUMENTS INC,HOUSTON,TX 77001
关键词
D O I
10.1016/0040-6090(87)90095-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
9
引用
收藏
页码:237 / 244
页数:8
相关论文
共 9 条
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  • [4] d'Heurle F., 1975, J PHYS-PARIS, V36, P191
  • [5] DHEURLE FM, 1971, J VAC SCI TECHNOL, V9, P290
  • [6] DLUDEK G, 1986, ACTA METALL, V34, P661
  • [7] HALL-PETCH RELATION IN THIN-FILM METALLIZATIONS
    GRIFFIN, AJ
    BROTZEN, FR
    DUNN, C
    [J]. SCRIPTA METALLURGICA, 1986, 20 (09): : 1271 - 1272
  • [8] Hoffman R. W., 1966, PHYS THIN FILMS, VVol. 3, pp. 211
  • [9] SZE SM, 1983, VLSI TECHNOLOGY, P367