SELFALIGNED INTEGRATED SILICA ON SILICON WAVE-GUIDE-PHOTODIODE INTERFACE

被引：3

作者：

CROOKES, CG

CROSTON, IR

PESCOD, CR

机构：

[1] GEC-Marconi Research Centre, Great Baddow, Chelmsford, Essex CM2 8HN, West Hanningfield Road

来源：

ELECTRONICS LETTERS | 1994年 / 30卷 / 12期

关键词：

INTEGRATED OPTOELECTRONICS; PHOTODIODES; OPTICAL WAVE-GUIDES;

D O I：

10.1049/el:19940662

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors report the demonstration of planar, doped, silica waveguides integrated with rear-illuminated InGaAs/InP photodiodes for use in compact, singlemode, optoelectronic hybrid modules. The photodiodes are assembled with the waveguides using a selfaligned technique giving a mean excess loss of 0.9dB at 1.3mum and a 3dB bandwidth of 1.5GHz.

引用

页码：1002 / 1003

页数：2