SURFACE-ROUGHNESS SCALING OF PLASMA POLYMER-FILMS

被引:104
作者
COLLINS, GW
LETTS, SA
FEARON, EM
MCEACHERN, RL
BERNAT, TP
机构
[1] Lawrence Livermore National Laboratory, Livermore
关键词
D O I
10.1103/PhysRevLett.73.708
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Atomic force microscopy data reveal self-affine scaling of plasma polymer films. The rms surface roughness sigma increases with film thickness tau as sigma(f < xi-1) is similar to tau(beta), and with measurement length L as sigma(f > L-1 > xi-1) is similar to L(alpha), where xi is the surface roughness correlation length. At the deposition rate R = 2 mum/h, the scaling exponents alpha and beta are 0.9 and 0.7, both increasing to 1 at R = 1 mum/h. A competition between surface relaxation and deposition rate determine sigma and xi, which increase rapidly with R or inverse temperature.
引用
收藏
页码:708 / 711
页数:4
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