ELASTIC PROPERTIES OF SPIN-ON GLASS THIN-FILMS

被引：19

作者：

CARLOTTI, G ^{[1
]}

SOCINO, G ^{[1
]}

DOUCET, L ^{[1
]}

机构：

[1] SGS THOMSON MICROELECTR,F-38019 GRENOBLE,FRANCE

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 20期

关键词：

D O I：

10.1063/1.113124

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The elastic properties of siloxane spin-on glass films have been analyzed in order to achieve a characterization of this dielectric material, widely used in the technology of integrated circuits. Measurements of the biaxial stress as a function of time after deposition have shown that water inclusion strongly affects the intrinsic stress of the film, which is tensile in the as-deposited state and becomes compressive after a few days. Brillouin light scattering has then been used to determine the phase velocity of the Rayleigh and Sezawa acoustic modes in films with different thicknesses deposited on (100)-Si, leading to the evaluation of the elastic stiffness constants, of the Poisson's ratio and of the Young's modulus.© 1995 American Institute of Physics.

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页码：2682 / 2684

页数：3

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