COMPOSITION AND STRUCTURE OF SPUTTERED FILMS OF FERROELECTRIC NIOBATES

被引：11

作者：

FOSTER, NF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1971年 / 8卷 / 01期

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D O I：

10.1116/1.1316299

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：251 / +

页数：1

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