SURFACE-MODIFIED RUO2-BASED THICK-FILM RESISTORS USING ND-YAG LASER

被引：11

作者：

GOFUKU, E

OGAMA, T

TAKASAGO, H

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 12期

关键词：

D O I：

10.1063/1.343595

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6126 / 6131

页数：6

共 13 条

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