SILICON MICROMACHINING FOR MICRO-REPLICATION TECHNOLOGIES

被引：17

作者：

KLEIN, R

NEYER, A

机构：

[1] Universität Dortmund, Lehrstuhl für Hochfrequenztechnik, 44221 Dortmund

来源：

ELECTRONICS LETTERS | 1994年 / 30卷 / 20期

关键词：

OPTICAL POLYMERS; OPTICAL WAVE-GUIDES; SILICON ETCHING; NANOTECHNOLOGY;

D O I：

10.1049/el:19941121

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Silicon micromachining is applied to the fabrication of highly precise mould inserts to be used in the micro-replication of polymer waveguide components with integrated fibre alignment grooves. The waveguide structures with rectangular cross-section are realised by an anisotropic RIE process, whereas the integrated passive fibre alignment grooves are formed by anisotropic wet chemical etching Two processes (a two-mask process and a selfaligned one-mask process) are described for the accurate alignment of waveguide structures and fibre alignment grooves.

引用

页码：1672 / 1674

页数：3