STRUCTURE AND 100MHZ SOFT-MAGNETIC PROPERTIES IN MULTILAYERS AND GRANULAR THIN-FILMS

被引：44

作者：

FUJIMORI, H

机构：

[1] Institute for Materials Research, Tohoku University, Sendai

来源：

SCRIPTA METALLURGICA ET MATERIALIA | 1995年 / 33卷 / 10-11期

关键词：

D O I：

10.1016/0956-716X(95)00395-C

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Recent developments in high-frequency magnetic thin films are overviewed. The topics discussed are multilayered nanocrystalline films and two-phase granular alloy films with high electrical resistivity. First, it is shown that Fe/Fe-Hf-C multilayers are promising high-frequency films with saturation magnetization Bs= 20kG and permeability mu'=6,000 up to 10 similar to 20MHz, which are at the highest levels among these types of magnetic thin films. Second, it is shown that (Fe,Co,Ni)-(Si,B,Zr etc.)-(F,O,N) granular alloy films posses uniquely high electrical resistivity rho as 10(3) similar to 10 mu Omega-cm together with high Bs of about 10kG, and consequently exhibit remarkable frequency dependence of mu' and loss mu '' up to 500MHz. These new-types of thin films are possible candidate materials for future high-frequency devices such as ''magnetic integrated circuits''. The properties are attributed to the two-phase granular structure, consisting of metallic grains and less conductive intergrains.

引用

页码：1625 / 1636

页数：12

共 33 条

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