LOWER-DIMENSIONAL QUANTUM STRUCTURES BY SELECTIVE GROWTH AND GAS-PHASE NUCLEATION

被引:8
作者
VAHALA, KJ
SAUNDERS, WA
TSAI, CS
SERCEL, PC
KUECH, T
ATWATER, HA
FLAGAN, RC
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 04期
关键词
D O I
10.1116/1.586499
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
There is increasing interest in the potential application of quantum dots and quantum wires to various solid state devices. In this article, the physics of lower-dimensional quantum structures will be reviewed with emphasis on applications. In addition, two fabrication approaches under investigation at Caltech will be discussed. The first is based on selective nucleation of III-V semiconductors on a patterned host substrate and the second is gas-phase nucleation of III-V clusters. Recent results on formation of nanocrystal GaAs and silicon clusters in the gas phase are presented.
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页码:1660 / 1666
页数:7
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