THE THERMAL-STABILITY OF DIAMOND-LIKE CARBON

被引:240
作者
TALLANT, DR
PARMETER, JE
SIEGAL, MP
SIMPSON, RL
机构
[1] Sandia National Laboratories, Albuquerque
关键词
DIAMOND-LIKE CARBON; THERMAL STABILITY;
D O I
10.1016/0925-9635(94)00243-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond-like carbon (DLC) is a potential, low-cost substitute for diamond in certain applications, but little is known of the temperature range over which its desirable properties are retained. We have investigated the stability of DLC films at elevated temperature and high humidity using Raman spectroscopy, Auger electron spectroscopy and thermal desorption analysis. Exposure to boiling water and a hot (225 degrees C), humid environment does not appear to affect the DLC structure. Thermal desorption analysis detected the onset of hydrogen evolution from DLC in vacuum at 260 degrees C. Raman spectra show the conversion from DLC to nano-crystalline graphite (''glassy'' carbon) beginning at 300 degrees C in ambient air. Auger spectroscopy confirms the conversion of sp(3)-bonded carbon to sp(2)-bonded carbon above 300 degrees C Conversion to nano-crystalline graphite is complete by 450-600 degrees C in air. The structure and properties of DLC films are expected to be retained up to temperatures of at least 260 degrees C.
引用
收藏
页码:191 / 199
页数:9
相关论文
共 23 条
[1]  
AUERBACH I, 1987, 22ND P THERM C
[2]   COMPARISON OF THE THERMAL-STABILITY OF THE CODEPOSITED CARBON HYDROGEN LAYER TO THAT OF THE SATURATED IMPLANT LAYER [J].
CAUSEY, RA ;
WAMPLER, WR ;
WALSH, D .
JOURNAL OF NUCLEAR MATERIALS, 1990, 176 :987-991
[3]   EFFECTS OF SUBSTRATE-TEMPERATURE ON CHEMICAL-STRUCTURE OF AMORPHOUS-CARBON FILMS [J].
CHO, NH ;
VEIRS, DK ;
AGER, JW ;
RUBIN, MD ;
HOPPER, CB ;
BOGY, DB .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (05) :2243-2248
[4]   BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY [J].
DISCHLER, B ;
BUBENZER, A ;
KOIDL, P .
SOLID STATE COMMUNICATIONS, 1983, 48 (02) :105-108
[5]   STRUCTURE AND BONDING OF HYDROCARBON PLASMA GENERATED CARBON-FILMS - AN ELECTRON-ENERGY LOSS STUDY [J].
FINK, J ;
MULLERHEINZERLING, T ;
PFLUGER, J ;
BUBENZER, A ;
KOIDL, P ;
CRECELIUS, G .
SOLID STATE COMMUNICATIONS, 1983, 47 (09) :687-691
[6]   NEUTRON-SCATTERING STUDIES OF THE STRUCTURE OF HIGHLY TETRAHEDRAL AMORPHOUS DIAMOND-LIKE CARBON [J].
GASKELL, PH ;
SAEED, A ;
CHIEUX, P ;
MCKENZIE, DR .
PHYSICAL REVIEW LETTERS, 1991, 67 (10) :1286-1289
[7]   SURFACE-ANALYSIS OF DIAMONDLIKE CARBON-FILMS [J].
GREEN, AK ;
REHN, V .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (04) :1877-1879
[8]  
HSU W, 1993, COMMUNICATION
[9]   CHARACTERIZATION OF AMORPHOUS CARBON-HYDROGEN FILMS BY SOLID-STATE NUCLEAR MAGNETIC-RESONANCE [J].
KAPLAN, S ;
JANSEN, F ;
MACHONKIN, M .
APPLIED PHYSICS LETTERS, 1985, 47 (07) :750-753
[10]   RADIAL-DISTRIBUTION FUNCTION OF AMORPHOUS-CARBON [J].
LI, F ;
LANNIN, JS .
PHYSICAL REVIEW LETTERS, 1990, 65 (15) :1905-1908