FAST OXYGEN SENSORS BASED ON SPUTTERED STRONTIUM-TITANATE

被引:106
作者
GERBLINGER, J
MEIXNER, H
机构
[1] Siemens AG, Research Laboratories, D-8000 Munich 83
关键词
D O I
10.1016/0925-4005(91)80183-K
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The preparation of oxygen sensors based on sputtered strontium titanate films is described. Like bulk materials, the thin films show p-type and n-type conductivity which depends on the oxygen partial pressure. Using mixtures of argon and oxygen at 950-degrees-C, response times lower than 5 ms can be detected due to a change in the oxygen partial pressure. Because the temperature in an exhaust gas reaches its maximum value at lambda = 1, fast gas and lower temperature effects on the sensor signal of La-doped SrTiO3 can be separated.
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页码:99 / 102
页数:4
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