FAST OXYGEN SENSORS BASED ON SPUTTERED STRONTIUM-TITANATE

被引：106

作者：

GERBLINGER, J

MEIXNER, H

机构：

[1] Siemens AG, Research Laboratories, D-8000 Munich 83

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1991年 / 4卷 / 1-2期

关键词：

D O I：

10.1016/0925-4005(91)80183-K

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The preparation of oxygen sensors based on sputtered strontium titanate films is described. Like bulk materials, the thin films show p-type and n-type conductivity which depends on the oxygen partial pressure. Using mixtures of argon and oxygen at 950-degrees-C, response times lower than 5 ms can be detected due to a change in the oxygen partial pressure. Because the temperature in an exhaust gas reaches its maximum value at lambda = 1, fast gas and lower temperature effects on the sensor signal of La-doped SrTiO3 can be separated.

引用

页码：99 / 102

页数：4

共 6 条

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[3] ELECTRICAL-CONDUCTIVITY OF SPUTTERED FILMS OF STRONTIUM-TITANATE
GERBLINGER, J
MEIXNER, H
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