EVALUATION OF LIQUID PROPERTIES USING A SILICON LAMB WAVE SENSOR

被引：26

作者：

VELLEKOOP, MJ

LUBKING, GW

SARRO, PM

VENEMA, A

机构：

[1] DELFT UNIV TECHNOL,ELECTR INSTRUMENTAT LAB,2600 GA DELFT,NETHERLANDS

[2] DIMES,2600 GB DELFT,NETHERLANDS

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 43卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(93)00689-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design and realization of a Lamb wave oscillator sensor system are described. Both the oscillation frequency and the amplifier gain level are monitored, giving information about the Lamb wave velocity and amplitude, respectively. The system is fabricated in two separate silicon chips (hybrid set-up) or in one chip (monolithic set-up), and can be used for different sensor applications, in liquid or gas environment. We demonstrate the sensor for detection of the density and viscosity of a liquid, and for sensing of the adsorption of human serum albumin (HSA) at the sensor surface.

引用

页码：175 / 180

页数：6

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