ZINC-OXIDE-ON-SILICON SURFACE ACOUSTIC-WAVE RESONATORS

被引：13

作者：

MARTIN, SJ

GUNSHOR, RL

PIERRET, RF

机构：

来源：

关键词：

D O I：

10.1063/1.92045

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：700 / 701

页数：2

共 11 条

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[5]

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