STRUCTURE OF CDTE(111)B GROWN BY MBE ON MISORIENTED SI(001)

被引:67
作者
CHEN, YP
SIVANANTHAN, S
FAURIE, JP
机构
[1] Microphysics Laboratory, Physics Department, University of Illinois at Chicago, Chicago, 60607-7059, IL
关键词
CDTE EPITAXIAL LAYERS; MBE; RHEED ANALYSIS; SI SUBSTRATES;
D O I
10.1007/BF02817509
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Single domain CdTe (111)B has been grown on Si(001) substrates tilted 1-degrees, 2-degrees, and 4-degrees toward [110]. All the layers started with a double-domain structure, then a transition from a double- to a single-domain was observed by reflection high energy electron diffraction. A microscopic picture of this transition is presented. We also measured the tilt between CdTe (111)B and Si(001). The result does not follow the tilt predicted by the currently existing model. A new model of the microscopic mechanism of CdTe (111)B growth is presented. New evidence indicates that optimizing the tilt of the substrate surface is very crucial in improving the CdTe (111)B crystal quality.
引用
收藏
页码:951 / 957
页数:7
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