MASS-SPECTRA ANALYSES OF IMPURITIES AND ION CLUSTERS IN AMORPHOUS AND CRYSTALLINE SILICON FILMS

被引：15

作者：

FELDMAN, C

SATKIEWICZ, FG

机构：

[1] JOHNS HOPKINS UNIV, APPL PHYS LAB, SILVER SPRING, MD 20910 USA

[2] GCA CORP, TECHNOL DIV, BEDFORD, MA 01730 USA

来源：

关键词：

D O I：

10.1149/1.2403640

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1111 / 1116

页数：6

共 19 条

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[6]

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[7]

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FELDMAN, C ;

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[9]

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[10]

Herman F., 1972, J NON-CRYST SOLIDS, V8-10, P359, DOI [10.1016/0022-3093(72)90160-3, DOI 10.1016/0022-3093(72)90160-3]